ETL Screen Shots Fig.19. The Diffraction Grating Evaluation Facility (DGEF) of the NASA GSFC Optics Branch. Fig.20. The FAUST scatterometer set-up (vacuum environment configuration). Focusing mirror focal length is 1.2 m. All hardware is computer-controlled (except grating tip-tilt mount). Fig.21. The NRL beamline X24C attached to the NSLS X-ray ring. Fig.22. The synchrotron radiation is dispersed by a monochromator that has a resolving power up to 1000 and 108 to 1012 photons/sec/0.1% bandpass peaking at ~ 100 eV. Thin filters are suppressed the radiation from the monochromator in the higher harmonics. The wavelength scale is established by the geometry of the monochromator and the absorption edges of the filters. Two elements (e.g. grating and mirror) are precisely translated and rotated by computer control while maintaining fixed entrance and exit slits. Gratings are selected without breaking vacuum and cover from 1 keV through the visible. The radiation is 90% polarized with the electric field vector in the plane of the storage ring. Fig.23. A photograph of the reflectometer, the photodiode chamber, and the larger instrument calibration chamber attached to the X24C beamline. Fig.24. Efficiency of –1 order of a 2400 g/mm blazed holographic master grating computed with the average AFM groove profile of 7.0 nm depth and RI of SiO2 taken from the CXRO compilation for different calculation modes vs. wavelength. Fig.25. Measured and calculated efficiency of –1 order of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency models calculated for different groove profiles and RI of SiO2 taken from the CXRO compilation. Fig.26. Measured and calculated efficiency of –1 order of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency models calculated for scaled AFM groove profiles and RI of SiO2 taken from different sources. Fig.27. Measured and calculated efficiency of orders of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency model calculated for the average AFM groove profile of 7.0 nm depth and RI of SiO2 taken from the CXRO compilation. Fig.28. The efficiency certificate of orders of a 2400 g/mm blazed holographic concave master grating working in the soft X-ray–EUV range. Efficiency calculated for the average AFM groove profile of 7.0 nm depth and RIs of SiO2 taken from the CXRO compilation. Fig.19. Diffraction Grating Evaluation Facility (DGEF) of NASA GSFC Fig.20. FAUST scatterometer set-up (vacuum environment configuration) Fig.21. NRL beamline X24C attached to NSLS X-ray ring Fig.22. X24C beamline monochromator geometry Fig.23. Calibration chambers attached to the X24C beamline Fig.24. Calculated efficiency of –1 order of 2400/mm holographic master grating Fig.25. Measured and calculated efficiency of –1 order of 2400/mm holographic master grating Fig.26. Measured and calculated efficiency of –1 order of 2400/mm holographic master grating Fig.27. Measured and calculated efficiency of orders of 2400/mm holographic master grating Fig.28. Efficiency certificate of orders of 2400/mm holographic master grating Copyright © 1996-2010 International Intellectual Group, Inc. All rights reserved.