ETL Screen Shots Fig.24. Efficiency of –1 order of a 2400 g/mm blazed holographic master grating computed with the average AFM groove profile of 7.0 nm depth and RI of SiO2 taken from the CXRO compilation for different calculation modes vs. wavelength. Fig.25. Measured and calculated efficiency of –1 order of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency models calculated for different groove profiles and RI of SiO2 taken from the CXRO compilation. Fig.26. Measured and calculated efficiency of –1 order of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency models calculated for scaled AFM groove profiles and RI of SiO2 taken from different sources. Fig.27. Measured and calculated efficiency of orders of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency model calculated for the average AFM groove profile of 7.0 nm depth and RI of SiO2 taken from the CXRO compilation. Fig.28. The efficiency certificate of orders of a 2400 g/mm blazed holographic concave master grating working in the soft X-ray–EUV range. Efficiency calculated for the average AFM groove profile of 7.0 nm depth and RIs of SiO2 taken from the CXRO compilation. Fig.29. (a) The measured grating efficiency in the zero order at an angle of incidence of 15.2°. (b) The reflectance of 743 Ε of SiO2 and 30 Ε of Al2O3 on opaque aluminum calculated at an angle of incidence of 15.2°. Fig.30. The fit of Gaussian profiles (smooth curves) to the measured grating efficiencies (data points). The wavelength of the incident radiation was 187.9 Ε, and the angle of incidence was 15.2°. Fig.31. Efficiency of –1 order of a replica of a 2400 g/mm blazed holographic grating computed with the average AFM groove profile of 8.5 nm depth and RIs taken from the Palik tables for different calculation modes vs. wavelength. Fig.32. Measured and calculated efficiency of –1 order of a replica of a 2400 g/mm blazed holographic grating, plotted vs. wavelength. Efficiency models calculated for scaled AFM groove profiles and RIs taken from different sources. Fig.33. Measured and calculated efficiency of –1 order of a replica of a 2400 g/mm blazed holographic grating, plotted in the investigated short wavelength range. Efficiency models calculated for the average AFM groove profile of 8.5 nm depth and RIs taken from different sources. Fig.24. Calculated efficiency of –1 order of 2400/mm holographic master grating Fig.25. Measured and calculated efficiency of –1 order of 2400/mm holographic master grating Fig.26. Measured and calculated efficiency of –1 order of 2400/mm holographic master grating Fig.27. Measured and calculated efficiency of orders of 2400/mm holographic master grating Fig.28. Efficiency certificate of orders of 2400/mm holographic master grating Fig.29. (a) Measured grating efficiency in 0 order; (b) reflectance of SiO2 and Al2O3 on opaque Al Fig.30. Fit of Gaussian profiles (smooth curves) to measured grating efficiencies (data points) Fig.31. Calculated efficiency of –1 order of 2400/mm replica grating Fig.32. Measured and calculated efficiency of –1 order of 2400/mm replica grating Fig.33. Measured and calculated efficiency of –1 order of 2400/mm replica grating in short waves Copyright © 1996-2010 International Intellectual Group, Inc. All rights reserved.