ETL Screen Shots Fig.29. (a) The measured grating efficiency in the zero order at an angle of incidence of 15.2°. (b) The reflectance of 743 Ε of SiO2 and 30 Ε of Al2O3 on opaque aluminum calculated at an angle of incidence of 15.2°. Fig.30. The fit of Gaussian profiles (smooth curves) to the measured grating efficiencies (data points). The wavelength of the incident radiation was 187.9 Ε, and the angle of incidence was 15.2°. Fig.31. Efficiency of –1 order of a replica of a 2400 g/mm blazed holographic grating computed with the average AFM groove profile of 8.5 nm depth and RIs taken from the Palik tables for different calculation modes vs. wavelength. Fig.32. Measured and calculated efficiency of –1 order of a replica of a 2400 g/mm blazed holographic grating, plotted vs. wavelength. Efficiency models calculated for scaled AFM groove profiles and RIs taken from different sources. Fig.33. Measured and calculated efficiency of –1 order of a replica of a 2400 g/mm blazed holographic grating, plotted in the investigated short wavelength range. Efficiency models calculated for the average AFM groove profile of 8.5 nm depth and RIs taken from different sources. Fig.34. Measured and calculated efficiency of orders of a replica of a 2400 g/mm blazed holographic grating, plotted vs. wavelength. Efficiency model calculated for the AFM groove profile of 8.5 nm depth and RIs taken from different sources. Fig.35. The efficiency certificate of orders of a replica of a 2400 g/mm blazed holographic concave grating working in the soft X-ray–EUV range. Efficiency calculated for the average AFM groove profile of 8.5 nm depth and RIs taken from the CXRO compilation (< 15 nm) and from the Palik handbook (>= 15 nm). Fig.36. The average groove profile for a grating 1528 based on AFM (solid line) and stylus profilometer data (dashed line). Fig.37 Different models of normalized to period groove profiles of an Ng41 grating. Fig.38. Efficiency in TE polarization of -1 order of an Ng41 grating with the average AFM groove profile and RI taken from Palik tables for different calculation modes vs. wavelength. Fig.29. (a) Measured grating efficiency in 0 order; (b) reflectance of SiO2 and Al2O3 on opaque Al Fig.30. Fit of Gaussian profiles (smooth curves) to measured grating efficiencies (data points) Fig.31. Calculated efficiency of –1 order of 2400/mm replica grating Fig.32. Measured and calculated efficiency of –1 order of 2400/mm replica grating Fig.33. Measured and calculated efficiency of –1 order of 2400/mm replica grating in short waves Fig.34. Measured and calculated efficiency of orders of 2400/mm replica grating Fig.35. Efficiency certificate of orders of 2400/mm replica grating Fig.36. Average groove profile for grating 1528 based on AFM and stylus profilometer data Fig.37 Models of normalized to period groove profiles of Ng41 grating Fig.38. Efficiency in TE polarization of -1 order of Ng41 grating Copyright © 1996-2010 International Intellectual Group, Inc. All rights reserved.