| Fig.5. Measured (points) and calculated (curves) of –1 order efficiency of G185M grating for NP polarization, plotted vs. wavelength. Efficiency models calculated for the nonconformal MgF2 layer and refractive indices of MgF2 taken from different sources. |
| Fig.6. Portion of a trace of grating 1528 taken with the microinterferometer. Both the depth and the profile shape are severely distorted. Compare with the profiles in Figs. 7 and 9. |
| Fig.7. Portion of a stylus profilometer trace for the grating shown in Figs. 6 and 9. The stylus radius is 0.1 micron in the axis scanned. Solid: Raw data; dashed: Averaged per method described in the text. |
| Fig. 8. Portion of a stylus profilometer trace for a deep echelle grating for IR spectroscopy. This grating, including deep (~57º) sloped facets, a flat top, and sharp bottom, is well resolved due to its extremely long period of ~140 microns. Height is in microns. |
| Fig.9. An example of an AFM image of a portion of two adjacent grooves of a ruled grating. The sample serial number is 1528-1-2-3. X is the axis perpendicular to the groove, Y is parallel to the grooves, and Z is the groove height. This is a planar red blazed reflection grating with a groove density of 67.556/mm. The facet shape and roughness are evident. |
| Fig.10. Contour plot of AFM data on a 3600/mm ruled grating for EUV normal incidence spectroscopy. Units are microns for the lateral scale and nm in the vertical scale bar. Rough groove edges are apparent. |
| Fig.11. The AFM image of the 2400/mm holographic master grating. The vertical scale has been exaggerated to reveal the texture of the grooves. The horizontal and vertical scales are indicated. |
| Fig.12. The histogram of the pixel heights that were derived from one 2400/mm holographic grating period of the AFM image.
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| Fig.13. The histogram of the blaze angles that were derived from one 2400/mm holographic grating period of the AFM image. |
| Fig.14. A representative scaled groove profile that was derived from the AFM image of the 2400/mm holographic grating and used in the calculation of the grating efficiency.
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