| Fig.7. Portion of a stylus profilometer trace for the grating shown in Figs. 6 and 9. The stylus radius is 0.1 micron in the axis scanned. Solid: Raw data; dashed: Averaged per method described in the text. |
| Fig. 8. Portion of a stylus profilometer trace for a deep echelle grating for IR spectroscopy. This grating, including deep (~57º) sloped facets, a flat top, and sharp bottom, is well resolved due to its extremely long period of ~140 microns. Height is in microns. |
| Fig.9. An example of an AFM image of a portion of two adjacent grooves of a ruled grating. The sample serial number is 1528-1-2-3. X is the axis perpendicular to the groove, Y is parallel to the grooves, and Z is the groove height. This is a planar red blazed reflection grating with a groove density of 67.556/mm. The facet shape and roughness are evident. |
| Fig.10. Contour plot of AFM data on a 3600/mm ruled grating for EUV normal incidence spectroscopy. Units are microns for the lateral scale and nm in the vertical scale bar. Rough groove edges are apparent. |
| Fig.11. The AFM image of the 2400/mm holographic master grating. The vertical scale has been exaggerated to reveal the texture of the grooves. The horizontal and vertical scales are indicated. |
| Fig.12. The histogram of the pixel heights that were derived from one 2400/mm holographic grating period of the AFM image.
|
| Fig.13. The histogram of the blaze angles that were derived from one 2400/mm holographic grating period of the AFM image. |
| Fig.14. A representative scaled groove profile that was derived from the AFM image of the 2400/mm holographic grating and used in the calculation of the grating efficiency.
|
|
Fig.15. The AFM image of 2 grooves of the 2400/mm replica grating. The image size is 1 mkm by 1 mkm. The horizontal and vertical scales are indicated.
|
| Fig.16. The PSD function of the 2400/mm replica grating derived from an AFM image of size 2 mkm. |
